HBO Mercury Short Arc Lamps (>200W)
Areas of application
- Semiconductor
HBO > 200W for ASML
Product family features
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
- Designed for long lasting performance
- Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss
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Areas of application
- Semiconductor
HBO > 200W for Canon
Product family features
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
- Designed for long lasting performance
- Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss
Reduce Read more
Areas of application
- Semiconductor
HBO > 200W for Nikon
Product family features
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
- Designed for long lasting performance
- Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss
Reduce Read more
Areas of application
- Semiconductor
HBO > 200W for Süss
Product family features
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
- Designed for long lasting performance
- Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss
Reduce Read more
Areas of application
- Semiconductor
HBO > 200W for TEL
Product family features
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
- Designed for long lasting performance
- Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss
Reduce Read more
Areas of application
- Semiconductor
HBO > 200W for Other Equipment
Product family features
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Ceramic housings designed specifically for high temperature halogen and metal halide applications for optimal exposure and throughput
- Designed for long lasting performance
- Qualified with major microlithography equipment manufacturers, including ASML, Canon, Nikon, and Süss
Reduce Read more
