Ellipsometry is an optical technique for investigating the dielectric properties of thin films or thin coatings. The method measures the change of polarization upon reflection or transmission. The measured values are then compared and fitted to a theoretical a model.

It can be used to characterize roughness, thickness and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.


  • Surface characteristics
  • Thin films and coatings

Technical Specifications

SENTECH Spectroscopic ellipsometer SENpro

  • Precise and independent measurement of refractive index and layer thickness
  • Layer thickness from 1nm to 5000 nm


Chemical and Physical Analytics

Chemical and Physical Analytics
Mittelstetter Weg 2, 86830 Schwabmünchen