SEM – Secondary Electron Microscopy

The Zeiss SUPRA 55-VP is a scanning electron microscope (SEM) with a field emission electron gun (FEG). This is the brightest type of electron source and gives the highest beam current and resolution capability

The SUPRA is able to handle a wide variety of samples, from the conducting and semiconducting materials, to large, beam sensitive or non-conducting samples. It has a resolution down to nm-range and secondary electron, backscattered and in-lens imaging modes. Measurements can also be taken under a variable pressure.

The system has an Oxford Instruments energy-dispersive X-ray (EDX) spectrometer that allows elemental composition analysis with a detection limit of approx. 0.5 atom%.

In combination with state-of-the-art preparation equipments the SEM is a powerful tool for the analysis of surfaces and cross-sections.


  • Imaging from mm to nm scale
  • Topography or Element-Density-Contrast

Technical Specifications

Zeiss Supra 55VP Field Emission Scanning Electron Microscope

  • Ultra high resolution at low kV: 1.7nm @ 1.0kV, 4 nm @ 0.1kV
  • High efficiency In-lens detector for clear topographic imaging in high vacuum mode
  • Ultra stable high current mode X-ray analysis and EBSD applications; better than 0.2%/h
  • Large 5-axes motorised eucentric stage


Chemical and Physical Analytics

Chemical and Physical Analytics
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